Both alumina ceramics and silicon carbide ceramics have the physical properties of compactness, high hardness, and high wear resistance, as well as good heat resistance, excellent mechanical strength, good insulation and good corrosion resistance in high temperature environments, etc. Physical properties, it is an excellent material for making semiconductor equipment robotic arms. From the perspective of material properties, silicon carbide ceramics are more suitable for making ceramic manipulators, but in terms of economic aspects such as material price and processing difficulty, alumina ceramic manipulators are more cost-effective.
Post time: Feb-13-2024